LNEYA Enfriadoras industriales Fabricante Proveedor
Semiconductor FAB Process Temperature Control
LNEYA has rich experience in temperature control of semiconductor industry products, and its products cover various process temperature control such as lithography, etching, thin film deposition, polishing, etc.
Products include: high-precision chiller heater, low-temperature Chiller, compressor-free heat exchange unit, etc., with temperature control accuracy up to ±0.05℃
解决方案
SOLUCIÓN
Semiconductor manufacturing is an extremely environmentally demanding process, and many process steps are very sensitive to temperature.
For example, in the photolithography process, the optical system of the photolithography machine needs to work in a stable temperature environment, because a slight change in temperature may cause deviations in the optical path, which in turn affects the accuracy of the photolithography. In processes such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), the reaction temperature directly affects the quality and performance of the film. Accurate temperature control can ensure that the deposited film has uniform thickness and accurate composition, thereby improving the performance and yield of the chip.
FLTZ Variable Frequency Chiller
-Precisión del control de temperatura ±0,05℃ (temperatura de salida en estado estacionario).
-90~+100℃, utilizado principalmente para el control preciso de la temperatura en los procesos de producción y ensayo de semiconductores. La empresa aplica diversos algoritmos en el sistema para lograr una respuesta rápida del sistema y una gran precisión de control.
Serie LT de frecuencia fija
—Compressor cascade refrigeration,low temperature -80℃
El rango de temperatura del refrigerador LNEYA es de -80℃ a -5℃, utilizando tecnología de superenfriamiento secundario, enfriamiento rápido. Gran fiabilidad del producto y excelente rendimiento.
Chiller Heat Exchange Series
—No compressor is used
ETCU sistema de intercambio de calor sin compresor, el sistema puede ser universal tanque de expansión, condensador, sistema de agua de refrigeración, etc, que puede reducir eficazmente el tamaño de los equipos y reducir el número de pasos de funcionamiento.
ZLTZ High-efficiency Heat Exchange Chiller
—Automatically recover heat transfer medium
Combined with microchannel reactors for high exothermic temperature control, the heat transfer efficiency is more than 5 times that of heat transfer oil under the same flow rate conditions. At the same time, the inlet and outlet temperature difference is small, and the temperature field is highly uniform, which is particularly suitable for applications with violent exothermic reactions.
