Thermal Chillers for Semiconductor ATE & Process
Advanced liquid temperature control technology, actively exploring and researching component test systems, mainly used for temperature test simulation in pharmaceutical chemicals, new energy, semiconductors, and aerospace testing, with wide temperature direction and high temperature rise and fall, temperature range: -80°C~+90°C, temperature control accuracy up to: ±0.05℃, suitable for various test requirements.
FLTZ Frequency Conversion Series
Temperature control range: -45℃~+90℃
The chiller’s exhaust and suction temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank level and other important information are all connected to the control system through sensors for comprehensive management, monitoring and recording.
Modelo |
5℃~90℃ |
-25℃~90℃ |
-45℃~90℃ |
-80℃~+90℃ |
-100℃~+90℃ |
Precisión del control de temperatura |
±0.05℃ |
±0.05℃ |
±0.05℃ |
±0.05℃ |
±0.05℃ |
Capacidad de refrigeración |
6KW~40KW @10℃ |
2KW~15KW @-15℃ |
1KW~8KW @-35℃ |
0.6KW~3KW @-70℃ |
1.5KW~3KW @-90℃ |
Rated test conditions for all equipment: Dry bulb temperature: 20℃; Wet bulb temperature: 16℃. Inlet water temperature: 20℃; Outlet water temperature: 25℃.
FLTZ Frequency Conversion Multi-channel Series
Temperature control range: -45℃~+100℃
Multi channel independent temperature control, which can have a separate temperature range, cooling and heating capacity, thermal conductivity medium flow rate, etc., adopts two independent systems.
The system can be used for universal expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and operation steps.
Modelo |
FLTZ-203W/2T dual system |
FLTZ-305W/2T dual system |
FLTZ-406W/2T dual system |
Temperatura |
-20℃~90℃ |
-30℃~90℃ |
-45℃~90℃ |
Precisión del control de temperatura |
±0.1℃ |
Heat conducting medium flow rate |
15~45l/min 6bar max |
Heating capacity |
2,5 kW |
2,5 kW |
2,5 kW |
2,5 kW |
3,5 kW |
3,5 kW |
Capacidad de refrigeración |
3kW @-15℃ |
3kW @-15℃ |
5kW @-15℃ |
5kW @-15℃ |
2.5kW @-35℃ |
2.5kW @-35℃ |
Rated test conditions for all equipment: dry bulb temperature: 20℃; wet bulb temperature: 16℃. Inlet water temperature: 20℃; outlet water temperature: 25℃.
ETCU Heat Exchange Chiller Series
Adopting compressor-free refrigeration system
temperature control range is: 5℃~+90℃
temperature control accuracy: ±0.05℃
Modelo |
ETCU-005W |
ETCU-015W |
ETCU-030W |
ETCU-050W |
ETCU-100W |
ETCU-200W |
ETCU-300W |
Temperatura |
Cooling water temperature +5℃~90℃ |
Precisión del control de temperatura |
±0.05℃(Steady state outlet temperature) |
Temperatura del agua de refrigeración |
7℃~30℃ Cooling water flow is controlled by Siemens/Honeywell regulating valves |
Capacidad de refrigeración |
5kW |
15 kW |
30 kW |
50 kW |
100 kW |
200 kW |
300 kW |
Rated test conditions for all equipment: dry bulb temperature: 20℃; wet bulb temperature: 16℃. Inlet water temperature: 20℃; outlet water temperature: 25℃.
AES Series Thermal Stream
Thermal Solutions for ATE testing
temperature control range is: -115℃~225℃
temperature control accuracy: ±0.1℃
Modelo |
AES-4535 AES-4535W |
AES-6035 AES-6035W |
AES-8035 AES-8035W |
AES-A1035W |
AES-A1235W |
Temperatura |
-40℃~225℃ |
-60℃~225℃ |
-80℃~225℃ |
-100℃~225℃ |
-120℃~225℃ |
Precisión de la temperatura |
±0.1℃(Steady state outlet temperature) |
Air requirements |
Air filter < 5um air oil content < 0.1um air temp and humidity:5℃-32℃ 0-50%RH |
Air treatment capacity |
10m³/h-m³/h pressure 5bar-7.6bar |
Contact LNEYA technical engineer for model selection
Aplicaciones
Temperature control system for production process and testing links.
Applied in semiconductors, LEDs, LCDs, solar photovoltaics and other fields;
The variable frequency pump can adjust the circulating fluid pressure and flow, Circulation heating can be achieved without a heater;
Multi-channel independent temperature control, no mutual influence.
Such as chillers that control the processing temperature on the Fab equipments.
Cooling of CMOS/CCD sensors in semiconductor metrology systems.
Recirculating Chiller for semiconductor metering AOI system.
Refrigerador de un canal refrigerado por aire, diseñado principalmente para máquinas de grabado. Se utiliza para proporcionar un control independiente de la temperatura de las paredes laterales de la cámara.
Used for plasma bevel etch and deposition; Thermal Atomic Layer Etching of Metal Tungsten.
enfriadores que controlan la temperatura de procesamiento en los equipos Fab
advantages
- Resultados de estabilidad y repetibilidad de la producción eficientes;
- Utilización de intercambiadores de calor de placas y calentadores de tuberías para mejorar los índices de refrigeración y calefacción;
- Rango de temperatura muy amplio, sin necesidad de sustituir el medio líquido;
- Sistema totalmente cerrado que prolonga la vida útil de los líquidos conductores térmicos;
- Adoptando la bomba de accionamiento magnético, no hay problema de fugas del sello del eje;
- Tecnología de refrigeración de alta temperatura, directamente iniciar el compresor para enfriar a 300 ℃.
La bomba de frecuencia variable puede ajustar la presión hidráulica de circulación y el caudal
Heating function
Due to the use of heat generated during heating, circulating heating can be achieved without the need for a heater.
Communication function
Standard equipment includes serial communication (RS232C, RS485) and contact input/output. Can communicate with customer devices or build systems.
client output signal
Customized Chiller Solutions
Recommended products
Control de temperatura :-120℃~350℃
Temperature control for high pressure reactor;Double-layer glass reactor;Double-layer reactor;Microchannel Reactor;Distillation system;Material aging test;Vacuum chamber etc.
Control de temperatura: -40℃~100℃
Simulación de temperatura para pruebas de calidad de vehículos: prueba de duración de la batería, banco de pruebas de inyectores/motores de combustible, prueba de airbags, banco de pruebas de componentes, etc. Puede simular las condiciones ambientales externas en la cámara climática o sustituir el sistema interno, lo que puede crear las condiciones de temperatura reales necesarias para el banco de pruebas.
Control de temperatura: -85℃~250℃
Suitable for semiconductor process wet washing, photolithography, etching, chemical meteorological deposition, physical meteorological deposition, and the electronics industry (photolithography process)
Accept Customized Outdoor Chiller and Indoor Chiller
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