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What type of chiller is needed for low-temperature etching?

For this requirement, the applicable types of coolers mainly include:

Multi channel chiller: A chiller with multiple independent temperature control circuits that can accurately control the temperature of different parts, ensuring uniform and stable temperature throughout the entire system. This is particularly important for complex etching equipment that requires maintaining different temperatures in different regions.

Low temperature chiller: This type of cooler is designed to generate and maintain extremely low temperatures, providing cooling capacity from ambient temperature to far below freezing point, suitable for low-temperature etching process requirements such as -70℃.

Closed loop refrigeration system: The closed loop system can more effectively control temperature and reduce energy consumption, suitable for etching processes that require long-term stable low-temperature operation, while reducing the impact on the external environment.

Semiconductor specific chillers: These chillers are customized to meet the needs of the semiconductor industry and have characteristics such as high-precision temperature control, fast response, low vibration, and low noise. Some are also designed with special material heat exchangers to cope with corrosive environments.

Handheld low-temperature chiller: Although not as widely used in production lines as large chillers, handheld low-temperature coolers may also be adopted in certain specific local low-temperature control or portable application scenarios due to their flexible and convenient advantages.

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