LTS -80℃～80℃ Fluoride cooling heating system

Temperature control during semiconductor manufacturing

Sistemas dinámicos de control de la temperatura Sistema de control de temperatura de líquidos fluorados Enfriadores para pruebas de semiconductores

Control del caudal12L/min~45L/min
Precisión de la temperatura±0.1℃ @-60℃~-30℃
Internal circulating liquid4L~10L
Depósito de expansión10L~20L
Lugar de origenChina

sistema dinámico de control de la temperatura Control de temperatura de líquidos fluorados Serie LTS enfriador de pruebas de semiconductores

CONSULTA

Descarga de datos del producto

manual.pdf

Product Parameters

Modelo	LTS-802	LTS-803	LTS-804	LTS-806	LTS-808
	LTS-802W	LTS-803W	LTS-804W	LTS-806W	LTS-808W
Temperatura	-80℃～-20℃
Precisión del control de temperatura	±0.1℃ -80℃～-50℃
Control del caudal	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
Volumen del depósito de expansión	10L	10L	15L	15L	20L
Visualización de la presión del sistema	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
Controlador	PLC Siemens, algoritmo de control PID difuso con algoritmo de control en cascada.
Temperature control	Modo de control de la temperatura de salida del fluido caloportador
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Carta de acuerdo	Interfaz Ethernet Protocolo TCP/IP
	Interfaz RS485 protocolo modbus RTU
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Sistema de circulación cerrado	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
Compresor	Emerson Copeland/Danfoss Scroll Flexible Compressor
Bomba de circulación	German brand magnetic circulation pump
Evaporador	Adopt Danfoss/Gaoli plate heat exchanger
Condensador	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
Accesorios de refrigeración	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Panel de control	Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
Seguridad	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
Tamaño de la interfaz de entrada y salida	G1/2	G1/2	G3/4	G3/4	G3/4

Descripción del producto

It is widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
Optimizar el muestreo de temperatura y la velocidad de respuesta, algoritmo de control de diseño especial, puede responder rápidamente a un control estable de la temperatura.
4. Enhance the design of the circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high-temperature cooling technology meets the requirements for stable operation when heat is loaded on the heat sink plate and requires cooling and heating constant temperature control.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

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